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1.TMAI chemisorbs tohydroxylated Si surface.2.Reaction of TMAl evolvingCH4; excess gases removedby inert gas purge.3.TMAl is reacted with watervapor.4.After inert purge moreTMAl is introduced5.Repeated ALD cycles resultin AO: film.

1. Construction hardware: bathroom hardware (such as faucets). door lock. Door Handle.Sanitary ware, hardware hinges, furniture, etc.2. Watchmaking industry: can be used for watch cases. Coating and crystal products forstraps.3. Other hardware: leather hardware. Stainless steel cutlery.

Due to its highly controllable deposition parameters (thickness, composition and structure), excellent deposition uniformity and consistency, atomic layer deposition technology has a wide range of application potentials in the fields of micro-nano electronics and nanomaterials.And with the developme