2023-01-19 News ALD deposition process - Al2O3 deposition process 1.TMAI chemisorbs tohydroxylated Si surface.2.Reaction of TMAl evolvingCH4; excess gases removedby inert gas purge.3.TMAl is reacted with watervapor.4.After inert purge moreTMAl is introduced5.Repeated ALD cycles resultin AO: film. PREVIOUS POST ALD deposition process - TiO2 deposition process NEXT POST Scope of application of vacuum coating machine